Nano machining

Nano Machining , Measurement , Control and the Applications

纳米级加工、测控技术及其应用

In recent years , as the rapid development of micro / nano machining technology , it comes higher requirements to measuring instruments in machining process .

近年来，随着微米/纳米加工技术的迅速发展，对加工过程中几何量的检测手段提出了更高的要求。

Micro-cantilever / tip prepared in microelectromechanical system ( MEMS ) has been widely used in many fields , such as the study of surface properties and the application in micro / nano machining , and it becomes an important and indispensable to the micro / nano science and technology .

利用微加工制造的微悬臂梁/探针尖已经广泛应用在微观表面性质测试和微纳米尺度加工等领域，成为微纳米研究领域中不可缺少的重要工具。

Simulation and Experiment Research on Nano Ceramic Machining Property

纳米陶瓷加工性特性仿真及试验研究

Study on Location Detection in Nano Manipulation Machining

纳米操作加工过程定位检测问题研究

Investigation on Nano - machining Characteristics of Silicon by AFM

采用AFM研究单晶硅纳米加工特性

Scanning probe microscope ( SPM ) is used not only for measuring the micro profiles of surfaces , but also for nano ultraprecise machining and atom manipulation now .

扫描探针显微镜（SPM）现在不仅用于表面微观形貌的检测，同时也用于纳米超精密加工和原子操纵。

The paper describes the present status and trends direction for the 21st century in the following fields : laser and electrical discharge machining , rapid prototyping systems , supercomputer simulating process , high speed machining , automatic forming of composite construction and CNC nano precision machining technology .

概要介绍了激光加工、放电加工、快速原型件成形、计算机过程模拟、高速加工、复合材料结构成形自动化以及纳米级数控精密加工等技术领域的发展现状和21世纪发展方向。

Real-time detection and feedback control are hoped to be applied in micro / nano manipulation and machining process .

人们也希望能有效对微纳米操作加工过程进行实时监控。

One of the most important aspects of Manufacturing Technology is High Precision Machining and Machining of microminiature parts . With the development of MEMS Technology & Nano Technology , the machining of three dimension microminiature component especially complex shape microminiature parts become more and more important .

机械制造技术的重要研究方向之一是高精度和微小型化零件的加工，随着微机电和纳米技术的快速发展，三维微小构件特别是复杂形状微小零件的制造显得越来越重要。